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Auxiliary gas for semiconductor industry of hydrogen production from water

Auxiliary gas for semiconductor industry of hydrogen production from water

  • Place of Origin:

    Fujian, China
  • Condition:

    Zxdh2 Manufacturing
  • Usage:

    HYDROGEN
  • Purity:

    99.9%-99.999%
  • Capacity:

    2-1000 Nm3/H
  • Key Selling Points:

    Long Service Life
  • Advantage:

    Energy Saving
  • Dew Point:

    <-70 ℃
  • Certification:

    ISO9001,ISO45001,ISO14001
  • Hydrogen pressure:

    20-35 Bar
  • Applicable Industries:

    Energy & Mining
  • Core Components:

    PLC
  • Control mode:

    PLC+ Touch Screen + Fully Automatic + Unattended
  • After-Sale Service Provided:

    Video Technical Support, Online Support, Field Maintenance And Repair Service
  • Product Detail

Applications in Semiconductor

Hydrogen is used in crystal growth and contrast preparation, oxidation process, epitaxy process and chemical deposition (CVD).The semiconductor industry has a high requirement for gas purity. The "incorporation" of trace impurities will change the surface activity of semiconductors.When SIHCI3 is generated from silicon by hydrogen chloride, it is separated by fractionation process and reduced by hydrogen at high temperature to meet the purity requirement of semiconductor: SIHCI3+H2----Si+3HCI. The purity requirement of hydrogen is very high in the above process.The impurities of carbon monoxide and carbon dioxide in hydrogen will oxidize the substrate and form polysilicon. If it contains methane, it will form silicon carbide into the outer layer, causing defects. In the past, the oxygen content was less than 1 * 10-6 and the dew point was lower than - 70c, but now it is more demanding.Hydrogen production by water electrolysis can meet the high requirements of semiconductors for hydrogen.

Why choose Us ?

Economic competitiveness: the best TCO (total cost of ownership) in similar products.
The transmission pressure of electrolytic cell is based on the user's demand,
which significantly reduces the energy required for further compression (low, medium and high pressure)

Safety: series simulation and modeling can improve the quality and safety of our equipment to a remarkable level
The fast dynamic response provides the flexibility needed for electricity market-led operations to completely optimize your investment.
Modular extensible architecture based on megawatt core modules is used as building blocks
Easy to install: The equipment is developed and manufactured by Zhongxinda, and customer's on-site assembly is only limited to interconnection.
We provide hydrogen production equipment, service and fast speed for hydrogenation station, new energy, chemical industry, non-ferrous metal, electric power, iron and steel, aviation and other industries.





Certification:

Zhongxinda company already passed ISO9001 quality management system certification
Zhongxinda company already passed the iso45001 occupational health system certification
Zhongxinda company already passed ISO14001 environmental management system certification 

Our Service Support
Zhongxinda is committed to providing high quality products and equipment.
The hydrogen production engineering department is backed up with senior engineers, covering production, installation, commissioning, and other services.
It is a comprehensive after-sales service team with technical service strength.
Our after-sales service team not only ensures that each set of equipment can be delivered to users quickly with excellent performance during on-site installation and commissioning,
we also provide professional online technical questions and quick on-site service after equipment failure when the official production of the equipment is done.

Pre-Sales Service
* Inquiry and consulting support.
* technical proposal support.
* View our Factory.
After-Sales Service
* Training how to instal the machine, training how to use the machine.
* Engineers available to service machinery overseas.

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If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.

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© Copyright: 2022 Xiamen Zhongxinda Hydrogen Energy Technology Co., Ltd. All Rights Reserved.

IPv6 network supported

IPv6 network supported

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Leave A Message

Leave A Message

    If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.

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